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HOMEResearch ResultPatent

Patent

Patent detail
Patent
Title The separation and recycling system for a perfluoro compounds
Accession Number 1020120018422
Entry date 2012-02-23
Domestic/Foreign 국내 Application/Accession 출원
Abstract
Abstract
The invention relates to the separation and recycling system of the perfluoro compound. And the removal or :

this the perfluoro compound including the sulfer hexafluoride generated in mainly, the semiconductor production process is effectively separated it is developed The separation and recycling system of the perfluoro compound processing the gas including dust generated in the exhaust gas generation facility using the perfluoro compound including the dry etching process and CVD cleaning chamber etc. or is generated The first dry pump and :

inhaling the exhaust gas generated in at least one exhaust gas generation facility. A plurality of pre-filter comprised of the moisture adsorption filter formed in upper part of the water jet nozzle, and water jet nozzle and the flue gas exhaust part formed with the upper portion of the moisture adsorption filters in which the exhaust gas immediately upwardly inhaled in the first dry pump with the sleep of the water, and water filled in the lower part of the first chamber, and the first chamber the part of the alkaline adsorbent layer, in which the exhaust gas introduced into the exhaust gas influx unit, flowed in and exhaust gas influx unit rise and passing and the water filled in the lower part is flowed in and water is sprayed to the upper portion of the alkaline adsorbent layer The membrane separation filter and :

in which the exhaust gas in which a plurality of separation holes having the diameter of the second chamber, and 3~4 angstroms (Å) it at least one is formed inside the second chamber is formed and passing through the pre-filter is flowed in and in which nitrogen passes through the separation hole and which is ejected to the nitrogen discharge part and in which the sulfer hexafluoride is unable to pass and ejecting to the sulfer hexafluoride exhausting part and put in the fire. The nitrogen recycle supply unit and :

consisting of the repower pipe for supplying nitrogen to tank from the second dry pump, inhaling the ejected nitrogen and the nitrogen discharge pipe, ejecting nitrogen in the airborne and the nitrogen tank, and the nitrogen supply pipe for supplying nitrogen to the first dry pump in the nitrogen tank. As to the repower pipe for, nitrogen is filled and the second dry pump. The sulfer hexafluoride recycle supply unit and :

consisting of the sulfer hexafluoride feeding line for supplying the sulfer hexafluoride to the sulfer hexafluoride tank, in which the sulfer hexafluoride ejected to the sulfer hexafluoride exhausting part is filled and at least one exhaust gas generation facility. It is related to the first flow sensor sensing the flow rate of the sulfur hexafluoride gas which the exhaust gas generation facility is supplied, the separation of the perfluoro compound including to the control unit which includes the second flow sensor sensing the flow rate of the exhaust gas, the third flow sensor sensing the flow rate of the nitrogen supply pipe, the fourth flow sensor sensing the flow rate ejected to the flue gas exhaust part, the fifth flow sensor sensing the flow rate of the nitrogen discharge part, the sixth flow sensor sensing the flow rate of the sulfer hexafluoride exhausting part, the first branch lois, and the third branch pipeline before reaching the first dry pump, and the recycling system. The first branch lois is divergence connected with the first branch valve to the exhaust gas influx unit of the pre-filter it passes the fourth flow sensor, and the second branch pipeline which is branched with the second divergence valve after passing the fifth flow sensor and is re-flowed in the membrane separation filter. The third branch pipeline is branched with the third divergence valve after passing the sixth flow sensor and is re-flowed in the membrane separation filter.

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